Research RF Sputtering Packages

An RF power blocking/DC MC 402 01/12, Revision A power pass filter will be required if two or more sources are two be run by DC and RF power to protect the DC power supply from damage. Everything required to install the Polaris™ internally mounted sputtering source into the users system and connect it with the power generation system is supplied. Included is one of a series of standard feedthrough or flange mounted assemblies, all necessary electrical, water, gas and vacuum hardware and a 3' long shielded cable between the feedthrough assembly and the power supply/matching network. A comprehensive documentation package is provided. Other feedthrough arrangements and cable lengths are possible - please consult the factory.

A 300 or 600 watt 13.56 MHz power generator packaged in a 19" 1/2 rack configuration and a separate impedance matching network are provided. This allows the matching network to be located as close to the sputtering source as possible. This is highly desirable and minimizes many problems like high reflected power, power cable overheating and burn-throughs and other unsafe conditions. Short cables are good. The impedance matching network provides the user with a broad tuning range. The impedance matching network is configured to enable it to match a wide range of impedances. The RF generator allows precise control from the front panel or via a rear panel analog or optional RS-232 interface. Power and tuning (capacitor) adjustment are accomplished either through knobs on the manual tuning network (forward and reflected power are read on the power generator front panel) or adjusted and read on the automatic matching network controller front panel or on the users sytem controls through the analog or optional RS-232 interface.

A Set-point potentiometer allows the operator to set and vary Forward/Incident RF Power. Digital meters display Forward and Reflected/Reflectant Power developed on the source. The external control interface on the back of the unit allows the power generator to be controlled by the user's programmable controller or computer. LED indicators provide visual indications of the status of safety and functional interlocks. The power generation system incorporates high efficiency switch mode power supplies and solid-state technology. They are very robust and can accept 30% reflected power before they operate in fold-back mode.