Target exchange is completed in minutes, even on very long sources.
Fast target exchange
Kamlok™ Fast Target Exchange System
One of a series of practical innovations that save money and increase productivity, the Kamlok™ Fast Target Exchange System is designed to reduce downtime, simplify service, and eliminate the fastener-related issues common in conventional target clamp designs. It uses a cam action mechanism to seal the target against the cathode body, completely eliminating target clamp fasteners and the drilling, re-tapping, and chip-out work often caused by seized hardware. The result is a simple, rugged, and reliable system that enables target exchange in just minutes, even on very long sources.
Key benefits
Designed to save time, reduce maintenance, and improve uptime
Fasteners are completely eliminated from the target clamp system.
Low cost of ownership is achieved through reduced maintenance and simpler service.
The system is simple, rugged, and reliable in operation.
Target clamp warping and bowing are avoided through interchangeable clamp sections.
The design is easily cleaned and serviced.
System overview
The highest performance sputtering sources just got better!
The unique Kamlok™ Fast Target Exchange System completely eliminates the use of target clamp fasteners, so re-deposited target material does not need to be chipped away to access hardware for removal. Seized fasteners are eliminated, and the drilling and re-tapping of damaged threaded holes caused by fastener galling are no longer required. Sealing the target against the cathode body is accomplished through a cam action mechanism.
The cam screws use a high adhesion proprietary coating that adapts to cycling between atmosphere and vacuum without particulate generation or degradation that causes fretting wear. The coating does not wear off during use, operates reliably under all conditions the sputtering source will be exposed to, and is UHV compatible.
The cam screws use a high adhesion proprietary coating that adapts to cycling between atmosphere and vacuum without particulate generation or degradation that causes fretting wear. The coating does not wear off during use, operates reliably under all conditions the sputtering source will be exposed to, and is UHV compatible.
Operation
Clear mechanism status and fast target exchange
Open/Released Position
Closed/Sealed Position
Visual marks indicating the open and closed condition of the Kamlok™ mechanism, together with a positive stop in both positions, assure ease of target exchange. Target clamps are sized to the overall target thickness and target mounting method, so several clamp sets may be needed when significant variations in thickness or mounting methods are required. All mechanism components are completely vacuum relieved, with no trapped volumes to create virtual leaks, contaminate films, or create arcing.
Targets are easily and quickly exchanged.
Target mounting options
Compatible with bonded, clamped, and directly water cooled target setups
A stepped target backing plate for thin targets is shown without the target installed. Targets can be bonded to the backing plate, clamped, or directly water cooled without a backing plate using the Kamlok™ Fast Target Exchange System.