2" Internal Mount Polaris™ Sputtering Source and Complete Assemblies

Basic Source

  1. Drawing 00000773, Rev. B  2" with KF-40 bulkhead flange

Fixed Position 1" Baseplate RF/DC Feedthrough

  1.  Drawing 00000784 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly

Fixed Position 1" Baseplate RF/DC Feedthrough with Shutter

  1. Drawing 00002244 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly with shutter

Fixed Position 1" Baseplate DC Feedthrough

  1. Drawing 00000786 2" with KF-40 to 1" baseplate DC feedthrough assembly

Variable Position - 1" RF/DC Baseplate Feedthrough

  1. Drawing 00000785 2" RF/DC with variable position 3/4" OD tube feedthrough assembly

Variable Position - 2.75" OD CF Flange RF/DC Baseplate Feedthrough

  1. Drawing 00002510 2" on 2.75" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly

Variable Position - 4.5" OD CF Flange RF/DC Baseplate Feedthrough

  1.  Drawing 00002919 2" on 4.5" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly

Variable Position with Shutter - 1" RF/DC Baseplate Feedthrough

  1. Drawing 00002173  2" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly

Variable Position with Shutter - 4.5" CF OD CF Flange RF/DC Baseplate Feedthrough

  1. Drawing 00004026  2" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly

Variable Position -  Right Angle Head - 2.75" OD CF Mounting Flange

  1. Drawing 00000336 2" RF/DC right angle head with variable position 3/4" OD tube feedthrough assembly

Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough

 Drawing 00000928, Rev. A  2" RF/DC with tilt mechanism & variable position 3/4" OD tube feedthrough assembly

Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough

Drawing 00002200 2" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting

8" OD (DN 200) CF Flange Mounted Variable Position with Shutter

Drawing 00000931, Rev. A  2" RF/DC on 8" OD CF Flange with tilt mechanism & variable position 3/4" OD tube compression fitting

4.5" OD CF Flange Mounted Variable Position with Tilt & Shutter

Drawing 00002602  2" RF/DC on 4.5" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

6" OD (DN 160) CF Flange Mounted Variable Position with Tilt & Shutter

Drawing 00002850 2" RF/DC on 6" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter

Drawing 00000947, Rev. A  2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

3" Internal Mount Polaris™ Sputtering Source and Complete Assemblies

Basic Source - KF-40 Mounting Flange

  1. Drawing 00000278, Rev. C  3" with KF-40 bulkhead flange (English (inch) fasteners)
  2. Drawing 00002093 3" with KF-40 bulkhead flange metric fasteners

Basic Source - 3 3/8" CF Mounting Flange

  1. Drawing 00002673 3" with 3 3/8" CF flange

Fixed Position 1" Baseplate RF/DC Feedthrough

  1. Drawing 00000719 3" with KF-40 to 1" baseplate RF/DC feedthrough assembly

Fixed Position 1" Baseplate DC Feedthrough

  1. Drawing 00000792 3" with KF-40 to 1" baseplate DC feedthrough assembly

Fixed Position Mounted on 10" Diameter CF Flange with Shutter

  1. Drawing 00003048 with RF/DC and Ferrofluid Rotary Feedthroughs

Variable Position - 1" RF/DC Baseplate Feedthrough

  1. Drawing 00000791, Rev. A  3" RF/DC with variable position 3/4" OD tube feedthrough assembly

Variable Position with Shutter - 1" RF/DC Baseplate Feedthroughs for Adjustable Height & Rotary Feedthrough

  1. Drawing 00002172  3" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly

Variable Position with Shutter - RF/DC Adjustable Height Feedthrough - 1.33" CF Rotary Feedthrough

  1. Drawing 00002928  3" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly

Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough

Drawing 00002135 3" RF/DC with tilt mechanism & variable position 3/4" OD tube compression fitting

Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough

  1. Drawing 00002118 3" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting

6" OD (DN 160) CF Flange Mounted Variable Position

  1.  Drawing 00002508  3" RF/DC on 6" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

8" OD (DN 200) CF Flange Mounted Variable Position

  1. Drawing 00002907  3" RF/DC on 8" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

8" OD (DN 200) CF Flange Mounted Variable Position with Shutter

  1. Drawing 00002158 3" RF/DC on 8" OD CF Flange with shutter and variable position 3/4" OD tube compression fitting

8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter

  1. Drawing 00002157 3" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

10" OD (DN 250) CF Flange Mounted Variable Position

  1. Drawing 00002714  3" RF/DC on 10" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

10" OD (DN 250) CF Flange Mounted Variable Position

  1. Drawing 00002714  3" RF/DC on 10" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

3" External Mount Configurations

3" Externally Mounted Source on ISO 160 Mounting Flange

  1. Drawing 00002879 3" Flange Mounted Source on ISO 160 Mounting Flange

Adaptors & Misc Parts

Baseplate Adaptors

  1.  Drawing 00000581 Baseplate Adaptor, 32.5mm to 1"

Legacy Drawings - No Longer Sold

2" Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange

  1. Drawing 00000197A.pdf  2" Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange

Internal Polaris™ with 1" RF/DC Baseplate Feedthrough

  1. Drawing 0000049A.pdf  2" Internal Polaris™ with 1" RF/DC Baseplate Feedthrough

2" Internal Polaris™ with 1" DC Baseplate Feedthrough

  1. Drawing 0000056A.pdf  2" Internal Polaris™ with 1" DC Baseplate Feedthrough